Products
Gas purifiers

The semiconductor fabrication process involves a variety of source gases and carrier gases. For the fabrication of higher quality semiconductors, our complete line of gas purifiers allows the user to select the optimal solution for the type of gas used.

Palladium alloy memrane permeation hydrogen gas purifier MODEL-VP-DH

Provides dust-free, ultra-high purity hydrogen with its purification method based on selective permeation through a palladium alloy membrane that rejects permeation of any substance other than hydrogen.
Our palladium cell has a long lifetime *1. Ensures great rigidity, high durability and superior hydrogen permeability with fine tubes of a palladium alloy that was developed independently by our company..
Ensures great rigidity, high durability and superior hydrogen permeability with fine tubes of palladium alloy.
It consistently provides stable, ultra-high purity hydrogen, obviating the need for regeneration.
Designed to operate in fully automatic mode.

*1 Proven results: 7 years or more

Internal diagram of cell

Equipment specifications

Model VP-DH
Applicable gas H2
Inlet Outlet
Max. pressure(MPa) 0.98 0.003
Temp.(℃) 5～35 5～35
Gas impurity ≧99.5% ≧99.999999%
Impurities
(vol.ppb)		 O2 - ≦0.1
CO - ≦0.1
CO2 - ≦0.1
H2 - -
CH4 - ≦0.1
N2 - ≦0.1
H2O - ≦1
Particle ≧0.1µm
≦1pcs/
0.0283m3

Please consult separately with us about flow rate

Related products

VPE-Series Gas Purifiers are developed by Japan Pionics to deliver the ultimate gas purity.

Allows purification of gas to ultra-high purity temperatures with the aid of our originally developed getter.