Products
Gas purifiers

The semiconductor fabrication process involves a variety of source gases and carrier gases. For the fabrication of higher quality semiconductors, our complete line of gas purifiers allows the user to select the optimal solution for the type of gas used.

Normal-temperature adsorption gas purifierModel-VPE　　AN/AAR/AHE/AH/AAM

Air Water Mechatronics is a pioneer of gas purifiers with the state of the art gas purification technologies and a broad range of technologies acquired through many years of experience. VPE-Series Gas Purifiers are developed by Air Water Mechatronics to deliver the ultimate gas purity and incorporate environmental and safety features that provide security and reliability.

The use of an original catalyst developed by our company allows gas purification to high levels of purity.

For switching between the purification series, it is possible to set the optimal series switching time for the source gas flow rate and concentration of impurities.

 It is also possible to switch the series based on the total flow, the switching time is longer when lower flow speeds are used, saving energy.

Space-saving installation (18% less than our other products) *1

The maintenance spaces are generally in front of and behind the equipment, allowing other equipment to be installed directly on either side of this equipment. 

(However space for the earthquake-resistant fittings is necessary.) Conforms to various standards (SEMI, ASME, ML, others).

Equipment specifications

Model VPE- AN AAR AHE AAM AH
Applicable
gas		 N2 Ar He NH3 H2
Inlet Outlet Inlet Outlet Inlet Outlet Inlet Outlet Inlet Outlet
Mpa 0.8 ≦⊿0.1 0.8 ≦⊿0.15 0.8 ≦⊿0.1 0.8 ≦⊿0.1 0.8 ≦⊿0.1
℃ 5～35 22～35 5～35
vol,ppb O2 1,000 ≦5（Standard）
≦0.1（Option）		 1,000 ≦5（Standard）
≦0.1（Option）		 1,000 ≦5（Standard）
≦0.1（Option）		 2,000 ≦5 1,000 ≦1（Standard）
≦0.1（Option）
CO 1,000 ≦5（Standard）
≦0.1（Option）		 1,000 ≦5（Standard）
≦0.1（Option）		 1,000 ≦5（Standard）
≦0.1（Option）		 - - 1,000 ≦5（Standard）
≦0.1（Option）
CO2 500 ≦5（Standard）
≦0.1（Option）		 500 ≦5（Standard）
≦0.1（Option）		 500 ≦5（Standard）
≦0.1（Option）		 - - 500 ≦5（Standard）
≦1（Option）
H2 1,000 ≦5（Standard）
≦0.1（Option）		 1,000 ≦5（Standard）
≦0.1（Option）		 1,000 ≦5（Standard）
≦0.1（Option）		 - - - -
H2O 2,600 ≦5（Standard）
≦0.1（Option）		 2,600 ≦5（Standard）
≦0.1（Option）		 2,600 ≦5（Standard）
≦0.1（Option）		 2,600 ≦55（Standard）
≦5（Option）		 2,600 ≦5（Standard）
≦1（Option）
Particle ≧0.1μm
（≦1pcs/cf）※1		 ≧0.1μm
（≦1pcs/cf）※1		 ≧0.1μm
（≦1pcs/cf）※1		 ≧0.1μm
（≦1pcs/cf）※1		 ≧0.1μm
（≦1pcs/cf）※1

 

*1 The outlet particle value can be guaranteed by choosing purified gas particle filter (Optional).

Specifications

Model VPE- 1.5 2 2.5 3 4 6 8 10 12 18
Standard flow rate[Nm3/h] 5 10 20 30 50 100 200 300 500 1,000
Model
(Applicable gas)		 AN （N2） ● ● ● ● ● ● ● ● ● ●
AAR （Ar） ● ● ● ● ● ● ● ● ● -
AHE （He） ● ● ● ● ● ● ● ● ● -
AH （H2） ● ● ● ● ● ● ● ● ● -
AAM （NH3） ● ● ● ● ● ● - - - -
Dimensions[mm] Width 400 700 750 950 1,200 1,555
Depth 600 650 600 750 950 1,220
Height 1,880 2,000 2,000 2,000 2,200 2,590
Weight[kg] 150 200 250 350 400 600 750 900 1,100 1,600

High flow rate type (Applicable gas:N2)

Model VPE- 16AN3 20AN3 24AN3 28AN3 32AN3 36AN3 40AN3 44AN3 48AN3
Maximum flow rate [Nm3/h] 2,750 4,300 6,150 8,400 11,000 13,900 17,150 20,800 24,750
Dimensions[mm] Width 2,400 2,900 3,500 4,300
Depth 1,800 2,000 2,500 3,100
Height 2,800 2,800 3,200 3,500
Weight[kg] 3,500 4,500 6,000 7,000 9,000 10,000 11,000 15,000 16,000

Related products

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