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Waste gas cleaner for semiconductors

With our accumulated know-how and field-proven skills related to waste gas treatment essential to the manufacturing of semiconductors, and thanks to a variety of technical innovations and cutting-edge equipment, we can meet increasingly diversified needs.

Ammonia Decomposition and Detoxifying Equipment MODEL-WGA

Model WGA(NH3 decomposition and detoxifying equipment) is primarily intended for treatment of waste gas from the GaN manufacturing process.
An effective combination of ordinary-temperature dry detoxification and catalyst decomposition based-detoxification ensures lower running costs, easier maintenance and less environmental impact.

Features

  • Model WGA detoxifying equipment is designed to decompose NH3 by means of a catalyst into nitrogen and hydrogen, thereby achieving full detoxification.
  • Causes no NOx emission which can be the byproduct of NH3 detoxification by oxidization.
  • Because it is not a burner type (combustion type), there is no need for propane supply equipment and drainage system. (However, A20 uses a water-cooled decomposition column.)
  • Ensures that the target harmful gases in the detoxified gas are removed to ACGIH/TLV-TWA in concentration.
  • The adsorption and regeneration type does not require replacement of the after-treatment column detoxifying agent, yielding lower running costs.

Equipment specifications

Model
Equipment dimensions W×D×H（mm）		 After-treatment method Inlet NH3 flow rate
[ℓ/min](nor)		 Inlet total flow rate
[ℓ/min](nor)
WGA-7A-2-A3
1,900×600×1,900		 A3 decomposition column
（dry detoxification type）		 12.4 37.6
WGA-12A-2-A5
2,550×800×1,900		 A5 decomposition column
（dry detoxification type）		 20.6 62.4
WGA-62B-2-A10
3,300×1,000×1,900		 A10 decomposition column
（dry detoxification type）		 35 115
WGA-62B-2-A20
3,100×1,350×2,200		 A20 decomposition column
（dry detoxification type）		 82.6 250.4
WGA-62B12A-2-A20-M
3,400×1,350×2,200		 A20 decomposition column
（regeneration type）

Flow Diagram (After-Treatment Method: Dry Detoxification)

Flow Diagram (After-Treatment Method: Adsorption and regeneration)

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