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Getter-type gas purifier MODEL-UHG/URT

Getter-type gas purifier MODEL-UHG/URT


  1. Allows purification of gas to ultra-high purity temperatures with the aid of our originally developed getter.
  2. Allows removal of nitrogen(N2), which is difficult with adsorption at normal temperature.
  3. Displays the total purified gas volume and the total purification time of the reaction column (getter), allowing the operator to check the remaining purification capacity of the column.
  4. The getter lifetime is long.
    (URT:: 20,000 hr UHG: 9,000 hr)
  5. Allows setting ON/OFF the reaction column heater at predetermined timing with week-based operation programming.(URT type)

Equipment performance

Applicable gas H2 Ar,He,Xe,etc.
Inlet Outlet Inlet Outlet
Pressure(MPa) 0.8 ⊿0.1 or less 0.8 ⊿0.1 or less
Temperature 5`35 5`35 5`35 5`35
  O2 5,000 0.1 100 0.1
CO 1,000 0.1 100 0.1
CO2 500 0.1 100 0.1
H2 - - 100 0.5
CH4 100 1 100 0.1
N2 5,000 0.1 5,000 0.1
H2O 10,000 1 2,500 0.1
Particle   0.1µm

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