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NF3 waste gas cleaner MODEL-WGH

NF3 waste gas cleaner MODEL-WGH

Features

  1. Decomposes NF3 to TLV(10 ppm ) or less in concentration.
  2. Ensures that the gas at the outlet is free from CO2, NOx and HF.
  3. Allows detoxification at low-temperature operation starting at 270℃.
  4. Eliminates the need for a secondary scrubber since the fluorine compound produced after decomposition of NF3 is fixed in the cartridge.(No need to install any wastewater treatment facility).
  5. Allows safe replacement of any exhausted detoxifying columns because they are of the cartridge type.

Equipment specifications

Dimensions W×D×H(mm) 1,200×800×2,000
Equipment weight(kg) 500
Power voltage(kVA) 17
Substitution gas Type Nitrogen
Supplied pressure 0.4`0.7MPa
Amount used 100(ℓ/min)nor
Gas for measurement Type Nitrogen or dry air
Supplied pressure 0.4`0.7MPa
Amount used small amount
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Catalyst Thermal Decomposition Equipment MODEL-WGB

Features

  1. Suited for the manufacturing process of highly dielectric and strong dielectric thin films.
  2. Safely removes VOC (such as THF and butyl acetate), Pb, Zr, Ti and other DPM, and organo-metallic complexes by oxidization.
  3. Allows the full oxidization at the air-mixing ratio equal to or lower than the lower explosive limit of organic solvent at a temperature range exceeding 250℃ with the aid of the action of an oxidizing catalyst.
  4. Eliminates the need for propane and other combustion fuels for the heater heating system, thereby reducing the emissions of CO2.
  5. Prevents the emission of produced metallic oxides to outside the system, by the installation of filters.
  6. Ensures safety through monitoring of pressures and temperatures.

Equipment specifications

Dimensions W×D×H(mm) 1,400×1,100×2,000
Equipment weight(kg) 850
Power voltage(kVA) 18
”RÄ—pAir Type Air
Supplied pressure 0.5`0.7MPa
Amount used 200`300
(ℓ/min)nor
Substitution gas Type Nitrogen
Supplied pressure 0.4`0.7MPa
Amount used 40(ℓ/min)nor
Gas for measurement Type Nitrogen or dry air
Supplied pressure 0.4`0.7MPa
Amount used small amount
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Adsorption and regeneration type waste gas cleaner
Adsorption and regeneration type waste gas cleaner

Because the adsorption columns are regenerated with water, the catridge lifetimes are long.

Pioclean Cartridge/Detecting agent
Pioclean Cartridge/Detecting agent

PIOCLEAN® detoxifying agents chemically adsorb any harmful components and fully remove the harmful substances from waste gas.

Inquiries for semiconductor equipment

Telephone: 81-463-53-8741 (Service hours: 10:00 - 17:00)
Facsimile: 81-463-53-8746 (24 hours)
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