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Piofine Cartridge (Gas Purifying Cartridge) MODEL-PF

Piofine Cartridge (Gas Purifying Cartridge) MODEL-PF

Features

  1. Use of oxygen scavengers and dehumidifying agents that we have developed ourselves enables excellent performance by this cartridge in refining gases for all types of semiconductors.
  2. The cartridge is compact with the refining column, high performance filter and diaphragm valves located in one structure. This means that the cartridge can be used close to point of use.
  3. The high performance filter and the baking that occurs before delivery are part of the overall plan that is implemented for particles and degassing.
  4. There are no special utility parts. The final processing of used cartridges occurs at our premises.(The N, F and B models can be regenerated.)

Equipment performance

Model PF- H,A,N
Applicable gas According to table of applicable gases below.
Inlet Outlet
Max. pressure (MPa) 0.5 ⊿0.1 or less
Temp.(℃) 5〜35 5〜35
Impurities
(vol.ppb)
O2 500 ≦10
H2O*1 1,000 ≦13
Model PF- B
Applicable gas According to table of applicable gases below.
Inlet Outlet
Max. pressure (MPa) 0.5 ⊿0.1 or less
Temp.(℃) 5〜35 5〜35
Impurities
(vol.ppb)
O2 500 ≦1
CO 500 ≦1
CO2 100 ≦1
H2 1,000 ≦1
H2O 1,000 ≦1

Model

Model Amount of purified gas
(ℓ/min(nor))
Purification capacity(m3(nor))*2 Weight
(kg)
H,N A B
PF-05-□*1 0.5 80 40 160 1.8
PF-2-□ 2.0 240 120 480 3.5
PF-10-□ 10.0 1,200 600 2,400 8.5

Applicable gases

H型 AsH3, PH3, SiH4, Si2H6, H2S, H2Se, etc
A型 HCl, BF3, SiF4, SiH2Cl2, HBr, etc
N型 NH3, (CH3)2NH, etc
B型 N2, He, Ar, H2, etc

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Line Filter XLF-M0.01μm-Capable Compact Teflon Membrane

Features

  1. The high-performance in-line gas filters have been developed as gas filters for semiconductors based on our proprietary technical know-how regarding clean gas delivery systems.

XLF-M 0.01μmCapable Compact Teflon Membrane

パイオファインカートリッジ(半導体用ガス精製器)MODEL-PFの画像

Specifications

Maximum service pressure:
0.98MPa(9.8kgf/cm2G)
Maximum service pressure difference:
0.3MPa(3kgf/cm2)*
Maximum allowable back pressure:
0.1MPa(1kgf/cm2)
Maximum service temp.:
130℃
Filter effective surface area:
12cm2
He leak rate:
1×10-9atm・cc/sec or less
Removal rate for uniform particle sizes:
0.01μm 99.999999% or more
0.05μm 99.999999% or more
0.10μm 99.999999% or more
Material:
Body: SUS316L
Surface treatment: Special electrolytic polishing finish
Element: PTFE membrane
Element support: PFA

Model list

Model Connection joint Inner surface treatment L(mm)
XLF-M-V2P 1/4" VCR type Special electrolytic polishing 84
XLF-M-S2P 1/4" Swagelok type 88*

Flow rate characteristics

XLF-D 0.01μm Mid-Size Teflon Membrane

XLF-D 0.01μm Mid-Size Teflon Membrane

Specifications

Maximum service pressure:
0.98MPa(9.8kgf/cm2G)
Maximum service pressure difference:
0.2MPa(2kgf/cm2)*
Maximum allowable back pressure:
0.07MPa(0.7kgf/cm2)
Maximum service temp.:
120℃
Filter effective surface area:
300cm2
He leak rate:
1×10-9atm・cc/sec or less
Removal rate for particles of uniform size:
0.01μm 99.999999% or more
0.05μm 99.999999% or more
0.10μm 99.999999% or more
Material:
Body: SUS316L
Inner surface treatment: Special electrolytic polishing finish
Element: PTFE membrane
Element support: ECTFE
O-ring : PTFE

Model list

Model Connection joint Inner surface treatment L(mm)
XLF-D-V2P 1/4" VCR type Special electrolytic polishing 127
XLF-D-V3P 3/8" VCR type
XLF-D-S2P 1/4" Swagelok type 126*
XLF-D-S3P 3/8" Swagelok type 132*

Flow rate characteristics

XLF-E 0.01μm Mid-Size Teflon Membrane

XLF-E 0.01μm Mid-Size Teflon Membrane

Specifications

Maximum service pressure:
0.98MPa(9.8kgf/cm2G)
Maximum service pressure difference:
0.3MPa(3kgf/cm2)*
Maximum allowable back pressure:
0.07MPa(0.7kgf/cm2)
Maximum service temp.:
120℃
Filter effective surface area:
34cm2
He leak rate:
1×10-9atm・cc/sec or less
Removal rate for particles of uniform size:
0.01μm 99.999999% or more
0.05μm 99.999999% or more
0.10μm 99.999999% or more
Material:
Body: SUS316L
Inner surface treatment: Special electrolytic polishing finish
Element: PTFE membrane
Element support: PFA
O-ring: PTFE

Model list

Model Connection joint L (mm)
XLF-E-V2P 1/4" VCR type 127
XLF-E-V3P 3/8" VCR type 133
XLF-E-S2P 1/4" Swagelok type 130*
XLF-E-S3P 3/8" Swagelok type 134*

Flow rate characteristics

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XLF-L 0.01μm Large Teflon Membrane

XLF-L 0.01μm Large Teflon Membrane

Specifications

Maximum service pressure:
0.98MPa(9.8kgf/cm2G)
Maximum service pressure difference:
0.3MPa(3kgf/cm2)*
Maximum allowable back pressure:
0.1MPa(1kgf/cm2)
Maximum service temp.:
100℃
Filter effective surface area:
1×10-9atm・cc/sec or less
Removal rate for particles of uniform size:
0.01μm 99.999999% or more
0.05μm 99.999999% or more
0.10μm 99.999999% or more
Material:
Body: SUS316L
Inner surface treatment: Special electrolytic polishing finish
Element: PTFE membrane
Element support: PP
O-ring: Viton (Teflon coating)

Model list

Model Connection joint L1 (mm) L2 (mm) øD (mm)
XLF-L-0504-P 1/2" 255 155 76.3
XLF-L-0515-P 15Asch5s
XLF-L-1015-P 392 275 101.6
XLF-L-1020-P 20Asch5s
XLF-L-1025-P 25Asch5s
XLF-L-2040-P 40Asch5s 652 535
XLF-L-3050-P 50Asch5s 912 795

Flow rate characteristics

ULF-B06 0.09μm General-Purpose Compact Teflon Membrane

ULF-B06 0.09μm General-Purpose Compact Teflon Membrane

Specifications

Maximum service pressure :
0.98MPa(9.8kgf/cm2G)
Maximum service pressure difference :
0.01MPa(0.1kgf/cm2)*1
Maximum allowable back pressure :
0.1MPa(1kgf/cm2)
Maximum service temp. :
100℃
Filter effective surface area :
10cm2
He leak rate :
0.09μm 99.999999% or more
Material:
Body: SUS316
Element: PTFE membrane
Element support: ETFE
O-ring: Viton (standard) *2

Model list

Model Connection joint L (mm)
ULF-B06-W2-V 1/4" Swagelok type 145*
ULF-B06-W3-V 3/8" Swagelok type 150*

Flow rate characteristics

SLF Series stainless steel filter capable of withstanding baking at 450℃

Features

  1. The use of a SUS316L stainless steel element produces a high-performance in-line gas filter capable of withstanding baking at 450℃ and with extremely little degassing.

Model

Material:
Body and element: SUS316L

Model list

Model Connection joint Inner surface treatment L (mm)
SLF-M-V2P 1/4" VCR type Special electrolytic polishing 84
SLF-E-V2P 127
Model Connection joint*1 L1 (mm) L2 (mm) ∅D (mm)
SLF-L-0204-P 1/2" 210 143 12
SLF-L-0604-P 300 233 35
SLF-L-0615-P 15Asch5s 315
SLF-L-1515-P 565 483 90
SLF-L-1525-P 25Asch5s
SLF-L-3025-P 985 903 180
SLF-L-3040-P 40Asch5s 1,005
SLF-L-5040-P 1,425 1,323 260

Flow rate characteristics

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Telephone: 81-463-53-8741 (Service hours: 10:00 - 17:00)
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