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钯‡‹à–Œ“§过Ž®氢Ÿƒ纯‰»‘•’u MODEL-VP-DH

Palladium alloy membrane permeation hydrogen gas purifier MODEL-VP-DH

Features

  1. Provides dust-free, ultra-high purity hydrogen with its purification method based on selective permeation through a palladium alloy membrane that rejects permeation of any substance other than hydrogen.
  2. Our palladium cell has a long lifetime *1. Ensures great rigidity, high durability and superior hydrogen permeability with fine tubes of a palladium alloy that was developed independently by our company..
    Ensures great rigidity, high durability and superior hydrogen permeability with fine tubes of palladium alloy.
  3. It consistently provides stable, ultra-high purity hydrogen, obviating the need for regeneration.
  4. Designed to operate in fully automatic mode.

*1 Proven results: 7 years or more

Internal diagram of cell

Internal diagram of cell

Equipment performance

Model

VP-DH
Applicable gas Hydrogen(H2)gas
Inlet Outlet
Pressure(MPa) 0.98 0.003
Temp. 5`35 5`40
H2 Purity †99.5% -
Impurities
(vol.ppb)
O2 - …0.1
CO - …0.1
CO2 - …0.1
H2 - -
CH4 - …0.1
N2 - …0.1
H2O - …1
Particle   †0.1µm
…1pcs/
0.0283m3
  • * For the compatible flow rates, please consult with us.
Flow Rate Variations Against Pressure Between Feed Gas and Purified Hydrogen

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Inquiries for semiconductor equipment

Facsimile: 81-463-53-8746 (24 hours)
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