Žå页>产•iM‘§>Ÿƒ‘Ì关联Š÷ŠBˆê览>Ÿƒ‘Ì纯‰»‘•’u>”½应Ž®Ÿƒ‘Ì纯‰»‘•’u

”½应Ž®Ÿƒ‘Ì纯‰»‘•’u MODEL-UHG/URT

Getter-type gas purifier MODEL-UHG/URT

Features

  1. Allows purification of gas to ultra-high purity temperatures with the aid of our originally developed getter.
  2. Allows removal of nitrogen(N2), which is difficult with adsorption at normal temperature.
  3. Displays the total purified gas volume and the total purification time of the reaction column (getter), allowing the operator to check the remaining purification capacity of the column.
  4. The getter lifetime is long.
    (URT:: 20,000 hr UHG: 9,000 hr)
  5. Allows setting ON/OFF the reaction column heater at predetermined timing with week-based operation programming.(URT type)

Equipment performance

Model UHG URT
Applicable gas H2 Ar,He,Xe,etc.
Inlet Outlet Inlet Outlet
Pressure(MPa) 0.8 ⊿0.1 or less 0.8 ⊿0.1 or less
Temperature 5`35 5`35 5`35 5`35
  O2 5,000 …0.1 100 …0.1
CO 1,000 …0.1 100 …0.1
CO2 500 …0.1 100 …0.1
Impurities
(ppb)
H2 - - 100 …0.5
CH4 100 …1 100 …0.1
N2 5,000 …0.1 5,000 …0.1
H2O 10,000 …1 2,500 …0.1
Particle   †0.1µm
…1pcs/0.0283m3
  †0.1µm
…1pcs/0.0283m3

Click here for related products.

Palladium alloy membrane permeation hydrogen gas purifier
钯‡‹à–Œ“§过Ž®氢Ÿƒ纯‰»‘•’u

This gas purifier passes the gas through a palladium alloy membrane that rejects permeation of any substance other than hydrogen.

Normal-temperature adsorption air purifier
í‰·‹z•Ž®‹óŸƒ纯‰»‘•’u

The JAR series of air purifier is primarily used for steppers, the zero gas for automobile emissions measurement, and fuel cell gas purification.

Inquiries for semiconductor equipment

Facsimile: 81-463-53-8746 (24 hours)
Click here for Request For Information Contact Form