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氨Ÿƒ•ª‰ð净‰»‘•’u MODEL-WGA

Ammonia Decomposition and Detoxifying Equipment MODEL-WGA

Model WGA NH3 decomposition and detoxifying equipment is primarily intended for treatment of waste gas from the GaN manufacturing process.
An effective combination of ordinary-temperature dry detoxification and catalyst decomposition based-detoxification ensures lower running costs, easier maintenance and less environmental impact.

Features

  1. Model WGA detoxifying equipment is designed to decompose NH3 by means of a catalyst into nitrogen and hydrogen, thereby achieving full detoxification.
  2. Causes no NOx emission which can be the byproduct of NH3 detoxification by oxidization.
  3. Because it is not a burner type (combustion type), there is no need for propane supply equipment and drainage system. (However, A20 uses a water-cooled decomposition column.)
  4. Ensures that the target harmful gases in the detoxified gas are removed to ACGIH/TLV-TWA in concentration.
  5. The adsorption and regeneration type does not require replacement of the after-treatment column detoxifying agent, yielding lower running costs.

Equipment specifications

Model
Equipment
dimensions
W~D~Himmj
After-treatment method Inlet NH3 flow rate
[ℓ/min](nor)
Inlet total flow rate
[ℓ/min](nor)
WGA-7A-2-A3
1,900~600~1,900
A3 decomposition column
(dry detoxification type)
12.4 37.6
WGA-12A-2-A5
2,550~800~1,900
A5 decomposition column
(dry decomposition type)
20.6 62.4
WGA-62B-2-A10
3,300~1,000~1,900
A10 decomposition column
(dry decomposition type)
35 115
WGA-62B-2-A20
3,100~1,350~2,200
A20 decomposition column
(dry decomposition type)
82.6 250.4
WGA-62B12A-2-A20-M
3,400~1,350~2,200
A20 decomposition column
(regeneration type)

Flow Diagram (After-Treatment Method: Dry Detoxification)

Flow Diagram (After-Treatment Method: Dry Detoxification)

Flow Diagram (After-Treatment Method: Adsorption and regeneration)

Flow Diagram (After-Treatment Method: Adsorption and regeneration)

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Eliminates the need for any ancillary facility.
Offers space-saving and lower-cost features.

Adsorption and regeneration type waste gas cleaner
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Because the adsorption columns are regenerated with water, the catridge lifetimes are long.

Inquiries for semiconductor equipment

Facsimile: 81-463-53-8746 (24 hours)
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